Inner coating of long-narrow tube by plasma sputtering

Long-narrow tubes are widely used in industry as water pipes, gas pipes and cooling pipes, etc. It is necessary to protect the inside of a metallic or dielectric tube against inner wall corrosion due to the inner surface bein g damaged by high temperature fluid or chemically reactive liquid. For thin film sputter coating on the inner wall of long-narrow tubes, the authors h ave developed the coating reactors using a coaxial magnetron pulsed plasma (CMPP) and a coaxial electron cyclotron resonance plasma (CECRP). (C) 2000 Elsevier Science B.V. All rights reserved.