Rq. Liang et al., Study of the surface-modified Teflon/ceramics complex material treated by microwave plasma with XPS analysis, SURF COAT, 131(1-3), 2000, pp. 294-299
A large volume microwave plasma source has been developed in our laboratory
. The plasma is generated in a pyrex glass cylinder with an inner diameter
of 30 cm and a height of 50 cm, and the microwave power is coupled into the
cylinder by eight equally spaced slot antennae on the inside wall of annul
ar waveguide. The apparatus has been applied to surface modification of the
material of PTFE/ceramic complex dielectrics (PTFEC). The chemical composi
tion of the modified PTFEC was investigated by X-ray photoelectron spectros
copy (XPS). Under plasma treatment, the oxygen content of the surface is fo
und to increase and fluorine content to decrease. XPS analysis proved that
interaction between different plasma and PTFEC surface layer exists in etch
ing, cross-linking, oxidizing simultaneously, and especially oxygen plasma
etching. (C) 2000 Elsevier Science B.V. All rights reserved.