This paper summarizes the plasma-based low-energy ion implantation techniqu
e, including plasma source ion nitriding/carburizing and plasma source low-
energy ion enhanced deposition of thin films, developed from a combination
of two techniques based on conventional plasma-based ion implantation and l
ow-energy ion beam implantation for improvement in wear resistance and corr
osion resistance for metals and alloys. An electron cyclotron resonance (EC
R) microwave plasma source is used to produce the plasma with the high plas
ma density, electron temperature and ionization degree. The ions are accele
rated from the plasma by a low pulsed negative bias of - 0.4- - 3 kV, which
is similar to the cathode potential of conventional plasma thermo-chemical
diffusion processing. The low process temperature is in the range from 150
degreesC to 500 degreesC, which corresponds to the upper limit of conventi
onal ion beam implantation and to the lower limit of plasma thermo-chemical
diffusion processing, respectively. Low-energy ion implantation and simult
aneous indiffusion is the main mass transfer mechanism, and direct thermo-c
hemical diffusion absorption is an additional mass transfer mechanism for f
ormation of the nitrided/carburized layer and thin film. It has been proved
that plasma-based low-energy ion implantation technique has the potential
for applications in industry for surface modification of metals and alloys.
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