Heat transfer simulation of HFCVD and fundamentals of diamond vapor growthreactor designing

Thermal blockage, thermal round flow and unevenness of state parameter fiel ds have been revealed through simulation of heat transfer in hot filament c hemical vapor growth and experimental study of the process. The phenomena l ead to deviation from rational process conditions resulting in low growth r ate, high production cost and instability of product quality. It has been s hown that the state parameter field can be controlled and large area, high speed, high quality diamond growth can be realized by using a tubular react or with a homogeneous distribution of hot filaments in the cross-section of the reactor and adiabatic boundary conditions. (C) 2000 Elsevier Science B .V. All rights reserved.