Experimental investigation of plasma dust and plasma polymerization

Authors
Qiu, ZG Jing, GY Zhao, ZF Bao, WD
Citation
Zg. Qiu et al., Experimental investigation of plasma dust and plasma polymerization, SURF COAT, 131(1-3), 2000, pp. 525-527
Citations number
4
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
02578972 → ACNP
Volume
131
Issue
1-3
Year of publication
2000
Pages
525 - 527
Database
ISI
SICI code
0257-8972(20000901)131:1-3<525:EIOPDA>2.0.ZU;2-0
Abstract
Plasma dust can be one product of plasma polymerization. When polymerizatio n occurs on the surface of a substrate, the product is a film; when polymer ization occurs in the plasma volume, the product is plasma dust. Film and d ust are different products with different chemical and physical characteris tics. Plasma dust is composed of many small spheres with diameters ranging from 0.2 to 0.5 mum. (C) 2000 Elsevier Science B.V. All rights reserved.