We have studied electron tunneling across the gap between two electrodes as
the gap is varied by electrodeposition and etching. The tunneling current
tends to change in a stepwise fashion, corresponding to a discrete change o
f the gap width. The stepwise change is due to the discrete nature of atoms
and a series of structural relaxations of the atoms at the electrodes betw
een stable configurations upon deposition and etching. By stabilizing the t
unneling current on various steps using a feedback loop, we have demonstrat
ed that stable molecular-scale gaps can be fabricated with subangstrom prec
ision. (C) 2000 American Institute of Physics. [S0003-6951(00)00651-3].