HYDROGEN PASSIVATED VERTICAL-CAVITY SURFACE-EMITTING LASERS

Hydrogen passivated vertical-cavity surface-emitting lasers (VCSELs) h ave been studied for obtaining low threshold current characteristics. After hydrogen plasma treatment, threshold currents are significantly improved compared to air-post type VCSELs due to the passivation of de fects and the decrease of leakage currents. We also observe the reduct ion of current injection area by the deactivation of impurity near the sidewall using moderately high temperature hydrogenation, indicating that hydrogenation is one of the useful methods for effective device i solation.