In this letter, BaSrTiO3 (BST) interdigitated capacitors on sapphire substr
ates have been investigated. The tunability and quality factor of interdigi
tal capacitors has been optimized for microwave and millimeter wave applica
tions. A monolithic K-band phase shifter circuit that employs voltage tunab
le BaSrTiO3 (BST) interdigitated capacitors is presented here.