OPTICAL-PROPERTIES OF PHOTORESIST FILMS INVESTIGATED BY REAL-TIME SPECTROSCOPIC ELLIPSOMETRY

We employed real-time spectroscopic ellipsometry (SE) to investigate t he optical properties of photoresist (PR) films. The fast. data. acqui sition capability of the real-time SE enabled us to monitor the evolut ion of the optical properties of PR during exposure. These real-time d ata were analyzed using the effective medium theory and regression pro cess. Thus, we could obtain not only the optical functions of PR both before- and after-exposure but also the information on the kinetic beh avior in between. This analysis process was compared with Dill's expos ure model. Real-time SE was a useful technique for the end-point detec tion in the exposure process but fast data acquisition was needed to a void error caused by probing source.