I. An et al., OPTICAL-PROPERTIES OF PHOTORESIST FILMS INVESTIGATED BY REAL-TIME SPECTROSCOPIC ELLIPSOMETRY, Journal of the Korean Physical Society, 30, 1997, pp. 226-230
We employed real-time spectroscopic ellipsometry (SE) to investigate t
he optical properties of photoresist (PR) films. The fast. data. acqui
sition capability of the real-time SE enabled us to monitor the evolut
ion of the optical properties of PR during exposure. These real-time d
ata were analyzed using the effective medium theory and regression pro
cess. Thus, we could obtain not only the optical functions of PR both
before- and after-exposure but also the information on the kinetic beh
avior in between. This analysis process was compared with Dill's expos
ure model. Real-time SE was a useful technique for the end-point detec
tion in the exposure process but fast data acquisition was needed to a
void error caused by probing source.