Lens systems for optimal forming of submicron electron probes

Authors
Citation
Vd. Gelever, Lens systems for optimal forming of submicron electron probes, IAN FIZ, 64(8), 2000, pp. 1601-1607
Citations number
7
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
64
Issue
8
Year of publication
2000
Pages
1601 - 1607
Database
ISI
SICI code
0367-6765(200009)64:8<1601:LSFOFO>2.0.ZU;2-B