The influence of secondary electron analyzer retarding net on the voltage contrast detector resolution in scanning electron microscopes

Authors
Pakhomova, IY Suvorinov, AV Filipchuk, TS
Citation
Iy. Pakhomova et al., The influence of secondary electron analyzer retarding net on the voltage contrast detector resolution in scanning electron microscopes, IAN FIZ, 64(8), 2000, pp. 1629-1632
Citations number
7
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
64
Issue
8
Year of publication
2000
Pages
1629 - 1632
Database
ISI
SICI code
0367-6765(200009)64:8<1629:TIOSEA>2.0.ZU;2-4