Characterization of antiresonant reflecting optical waveguide devices by scanning near-field optical microscopy

Silicon-based antiresonant reflecting optical waveguide (ARROW) devices wer e studied by means of a scanning near-field optical microscope. Various str uctures such as a Y junction of a Mach-Zehnder interferometer and a directi onal optical coupler were characterized, showing the propagation of the Lig ht inside the devices simultaneously with the topography. Scattering on the splitting point of the Y junction was shown, as well as a partial coupling of the light between the two branches of the coupler. Measurements on the decay length of the evanescent field were also performed to study the use o f the ARROW waveguide for sensor purposes. (C) 2000 Optical Society of Amer ica [S0740-3232(00)03812-6] OCIS codes: 130.0130, 130.3120, 130.0250, 180.0 180, 180.5810, 230.7310.