Nondestructive angle-resolved X-ray depth profiling: Interpretation of angle-resolved profiles using a Monte Carlo approach

Citation
Dk. Wilkinson et al., Nondestructive angle-resolved X-ray depth profiling: Interpretation of angle-resolved profiles using a Monte Carlo approach, MICROS MICR, 6(6), 2000, pp. 517-531
Citations number
17
Categorie Soggetti
Multidisciplinary,"Spectroscopy /Instrumentation/Analytical Sciences
Journal title
MICROSCOPY AND MICROANALYSIS
ISSN journal
14319276 → ACNP
Volume
6
Issue
6
Year of publication
2000
Pages
517 - 531
Database
ISI
SICI code
1431-9276(200011/12)6:6<517:NAXDPI>2.0.ZU;2-A
Abstract
A technique has been developed for the interpretation of composition-depth profiles from angle-resolved X-ray data using a Monte Carlo electron scatte ring simulation. This is a nondestructive depth profiling procedure. Softwa re has been developed that uses a Monte Carlo scattering simulation to gene rate the signal intensity from a multilayer sample for any combination of p rimary beam angle of incidence and take-off angle to the X-ray detector. An interactive C++ application uses this simulation to interpret measured ang le-resolved depth profiles. The method has been tested using a custom-made Ag/Al "staircase" sample containing two layers each of Ag and Al. Using the technique, it is possible to quantify the composition-depth profile for th e two- and three-layer "steps" of the sample. Qualitative information may b e gained about the four-layer area of the sample.