Nondestructive angle-resolved X-ray depth profiling: Interpretation of angle-resolved profiles using a Monte Carlo approach

A technique has been developed for the interpretation of composition-depth profiles from angle-resolved X-ray data using a Monte Carlo electron scatte ring simulation. This is a nondestructive depth profiling procedure. Softwa re has been developed that uses a Monte Carlo scattering simulation to gene rate the signal intensity from a multilayer sample for any combination of p rimary beam angle of incidence and take-off angle to the X-ray detector. An interactive C++ application uses this simulation to interpret measured ang le-resolved depth profiles. The method has been tested using a custom-made Ag/Al "staircase" sample containing two layers each of Ag and Al. Using the technique, it is possible to quantify the composition-depth profile for th e two- and three-layer "steps" of the sample. Qualitative information may b e gained about the four-layer area of the sample.