A new method is presented for microfabricating silicon-based neural pr
obes that are designed for neurobiology research. Such probes provide
unique capabilities to record high-resolution signals simultaneously f
rom multiple, precisely defined locations within neural tissue, The fa
brication process utilizes a plasma etch to define the probe outline,
resulting in sharp tips and compatibility with standard CMOS processes
, A low-noise amplifier array has been fabricated through the MOSIS se
rvice to complete a system that has been used in multiple successful p
hysiological experiments.