Crystal orientation dependence of macropore formation in p-type silicon using organic electrolytes

The crystal orientation dependence of pore formation in Si provides importa nt information on pore formation mechanisms, tn addition, the anisotropy of macropores is an important parameter for applications, especially for the microstructuring of silicon. The dependence of the macropore morphology on the orientation of p-typo silicon samples was studied for various electroly tes (mostly organic) containing HF. A comparison between organic and aqueou s electrolytes is given and discussed in terms of the "current-burst-mode1" , Carstensen ct al., Mater. Sci. Engn. B 69/70, 23 (2000).