Fabrication and characterization of a sensing device based on porous silicon

In this work we have fabricated a simple gas-sensing device based on porous silicon. Starting from the well-known porous silicon photoluminescence que nching due to oxygen, we have optimized the material and the device design, obtaining a reversible and stable O-2 gas sensor. A simple and cheap detec tor of;iir leaks in inert environment is of great interest for the alimenta ry industry. Full characterization of the device has been carried out in a gas sensor calibration apparatus, showing even a promising sensitivity at r oom temperature to a toxic gas like NO2.