An experimental investigation was made of the principal factors that determ
ine the possibility to increase pulse repetition rates in high-power KrF la
sers. Two prototypes of a compact industrial KrF laser were considered. The
first one produces a maximum average output power of similar to 620 W for
a pulse repetition rate of 4 kHz; the second, a more compact prototype, yie
lds a maximum pulse repetition rate of 5 kHz for an average output of 200 W
.