T. Thurn-albrecht et al., Ultrahigh-density nanowire arrays grown in self-assembled diblock copolymer templates, SCIENCE, 290(5499), 2000, pp. 2126-2129
We show a simple, robust, chemical route to the fabrication of ultrahigh-de
nsity arrays of nanopores with high aspect ratios using the equilibrium sel
f-assembled morphology of asymmetric diblock copolymers. The dimensions and
Lateral density of the array are determined by segmental interactions and
the copolymer molecular weight. Through direct current electrodeposition, w
e fabricated vertical arrays of nanowires with densities in excess of 1.9 x
10(11) wires per square centimeter. We found markedly enhanced coercivitie
s with ferromagnetic cobalt nanowires that point toward a route to ultrahig
h-density storage media. The copolymer approach described is practical, par
allel, compatible with current Lithographic processes, and amenable to mult
ilayered device fabrication.