We report on the critical layer thickness of GaN/InxGa1-xN/GaN double heter
ostructures in the composition range 0 <x <0.16. The evolution of the photo
luminescence spectra and the electrical properties of the InxGa1-xN well we
re monitored as its thickness was increased for a given % InN. Due to compr
essive stress and possible quantum-size effects, the emission energy from t
hin InGaN wells is blueshifted relative to thicker wells of a given % InN.
The transition from the blueshifted emission of strained InGaN to redshifte
d emission of relaxed InGaN is also accompanied by dramatic changes in film
conductivity and mobility. The thickness at which the onset of relaxation
occurs is deemed the critical layer thickness of the InxGa1-xN film. (C) 20
00 American Institute of Physics. [S0003-6951(00)02152-5].