Y. Hagimoto et al., Characterizing carrier-trapping phenomena in ultrathin SiO2 films by usingthe x-ray photoelectron spectroscopy time-dependent measurements, APPL PHYS L, 77(25), 2000, pp. 4175-4177
We have characterized the carrier-trapping phenomena in ultrathin (1.3-3.5
nm) SiO2 films (practical used thermal oxide and oxynitride) by using x-ray
photoelectron spectroscopy time-dependent measurements. It was found that
the net amount of hole traps in the ultrathin oxynitride is smaller than th
at in the ultrathin thermal oxide. This result is consistent with the previ
ously reported results for the thick thermal oxide and oxynitride using con
ventional electrical measurements. We consider what is responsible for the
contribution to the formation of hole traps. (C) 2000 American Institute of
Physics. [S0003-6951(00)03552-X].