Wavelength-dispersive total reflection X-ray fluorescence with high-brilliance undulator radiation at SPring-8

Wavelength-dispersive total reflection X-ray fluorescence (WD-TXRF) equipme nt supported by an energy-dispersive (ED) solid-state detector (SSD) has be en developed and installed in the BL16XU Industrial Consortium ID Beamline for Material Research at the SPring-8 synchrotron radiation research facili ty. Equipment specifications are given and results from our initial experim ent are discussed in this paper. In the experiment on the sensitivity of de tection of metallic impurities an a Si wafer, the lower limit of detection (LLD) using a Ge-SSD reached an order of 10(8) atoms/cm(2) with a correspon ding absolute weight of approximately 10 fg for ED-TXRF. In comparison, an order of 10(9) atoms/cm(2) with a corresponding weight of around 100 fg was obtained for WD-TXRF for the first time. Although ED-TXRF still has a lowe r LLD, using WD-TXRF can provide good energy resolution with a high count r ate, opening up a new field of X-ray fluorescence measurement.