Heat-resistant polyarylates for waveguide-type device application

Polyarylates (PARs) with high glass transition temperature (T-g) of over 20 0 degreesC are newly synthesized and used for waveguide-type device applica tion. Thermal and optical properties of PARs are investigated, and results indicate that PARs shaw high thermal stability as well as high optical tran sparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique toge ther with thermal development. Using a reactive-ion-etching (RIE) technique , the waveguide channel ridge was fabricated.