Hyperthermal O-3 beam produced by laser ablation of solid-ozone film

In order to obtain a highly concentrated hyperthermal ozone beam for mow ef fective Si oxidation, we performed laser ablation of solid-ozone. A KrF pul se laser was irradiated onto solidified ozone on a sapphire substrate coole d to 30 to 60 K using a cryocooler. A mixture of ozone, molecular oxygen an d atomic oxygen was detected using a time-of-flight method through a quadru pole mass filter. The velocity distribution of ablated ozone molecules was almost the same as the distribution at thermal equilibrium. An ozone beam w ith a fitted temperature of 2500 K and maximum transnational, energy of 3 e V was obtained under optimum laser conditions.