Analysis of multi layer system with X-ray fluorescence

Analysis of multi layer system can be performed non-destructive and contact -less with X-Ray Fluorescence. Especially semiconductor industry and micro sensorics need measuring systems that call analyse the more and more comple x systems. This measuring system has to determine not only coating thicknes s but also the composition of the several layers. In this paper the princip les of X-Ray fluorescence for coating thickness testing are referred and th e analytical performance of this method is documented for several purposes (Micro sensors, Solar cells).