Silicon microstructure for precise measurements of mechanical moments

In this paper we report the use of silicon bulk micromachining for inexpens ive fabrication of miniature silicon springs used as sensing elements in a system for measurement of small mechanical moments. Such 'torsional microsp rings' twist when mechanical moment is applied at the central part of the s tructure. The springs are designed and fabricated in a way where it is rela tively easy to technologically control all geometrical dimensions in microm eter range. Further on, since the spring is made from silicon, the mechanic al hysteresis is negligible, which is very important when measuring small m oments. (C) 2000 Elsevier Science Ltd. All rights reserved.