Fabrication of Y-Ba-Cu-O micro-particles by excimer laser processing

Periodical distribution of Y-Ba-Cu-O particles were obtained on amorphous Y -Ba-Cu-O films with 5-20 laser pulses in the energy density of 0.1 J/cm(2) X-ray diffraction patterns showed that the particles were polycrystalline. Scanning electron microscopy studies revealed that half-spherical or even s pherical particles were formed on the films. The diameters of the U-Ba-Cu-O particles were found to be dependent on film thickness, and sub-micro Y-Ba -Cu-O spherical particles with diameters of 250 nm have been obtained in 20 0 nm-thick Y-Ba-Cu-O films.