High quality La2-xSr2CuO4+delta thin films have been grown with different s
train and oxygen content. Strain was controlled by depositing either compre
ssive or tensile SrLaAlO4 buffer layer on SrTiO3 substrate. Oxygen content
was controlled by whether or not using an ozone/molecular oxygen mixture du
ring cooling to achieve better oxygen uptake. We found that both full oxyge
nation and compressive in-plane strain are critical for the superconducting
properties of the La2-xSrxCuO4+delta thin films, and perhaps the compressi
ve strain makes the oxygenation much easier.