T. Kawae et al., Fabrication of YBCO thin films by electron beam deposition with double sources and its properties, PHYSICA C, 341, 2000, pp. 2367-2368
We fabricated YBCO thin films by using an electron beam deposition apparatu
s with double sources, in which Y2O3 and Ba2Cu3OX are contained. By heating
the substrate from 400 degreesC to 690 degreesC during deposition, the qua
lity of the films was improved. It was found that when the substrate was he
ated during deposition;YBCO phase was drastically increased together with a
n increase in Tc-ON.