In precursors the metal ions are combined with acid groups of polymethacryl
ic acid (PMAA), polyacrylic acid (PAA) or novolac. Compared to thermal degr
adation temperatures of pure polymers those of precursors are low. Precurso
r films were patterned by UV lithography. Diffractometric investigations sh
owed that the c-axis oriented epitaxial films of YBa2Cu3Ox and Bi2Sr2CaCu2O
x originated from amorphous metal oxide films, which were received after th
ermal degradation of the precursor. Transition temperatures and current den
sities were determined by electric resistivity measurements.