The MOCVD process of the preparation of superconducting Bi-Sr-Ca-Cu-O thin
films was studied by theoretical and experimental approach. Thermodynamic a
nalysis of the Bi-Sr-Ca-Cu-O-C-H-Ar system using the Gibbs energy minimizat
ion method was performed to propose feasible deposition conditions for the
growth of superconducting films. The calculation results are compared with
the properties of thin films prepared in cold-wall rf-heated quartz reactor
from metalorganic precursors.