Yttria-stabilized zirconia (YSZ) and CeO2 buffer layers were used on MgO su
bstrates to control the in-plane epitaxy of YBCO films. Substrate temperatu
re control method in RF magnetron sputtering deposition was improved and th
e deposition was performed in good reproducibility. XRD results revealed an
excellent in-plane epitaxy with no evidence of misoriented grains in a YBC
O/CeO2/YSZ/MgO structure.