We fabricated ramp-edge Josephson junctions with barriers formed by interfa
ce treatments instead of epitaxially grown barrier layers. A low-dielectric
Sr2AlTaO6(SAT) layer was used as an ion-milling mask as well as an insulat
ing layer for the ramp-edge junctions. An ion-milled YBa2Cu3O7-x (YBCO)-edg
e surface was not exposed to solvent through all fabrication procedures. Th
e barriers were produced by structural modification at the edge of the YBCO
base electrode using high energy ion-beam treatment prior to deposition of
the YBCO counterelectrode. We investigated the effects of high energy ion-
beam treatment, annealing, and counterelectrode deposition temperature on t
he characteristics of the interface-controlled Josephson junctions. The spr
eads in the critical current (I,) as well as the junction parameters such a
s T-c, I-c, R-N were measured and discussed in relation to the interface st
ates.