Recently [1], we have shown that dislocations act as strong pinning sites f
or vortices in YBa2Cu3O7-delta films. Using a wet-chemical etching techniqu
e in combination with Atomic Force Microscopy, we investigate the distribut
ion of these natural linear defects in laser ablated films. We find that: (
i) dislocations are induced in the early stages of film growth at the subst
rate-film interface and persist up to the film surface, resulting in a unif
orm length distribution and (ii) the in-plane defect distribution exhibits
short-range ordering. This self-organization makes films completely differe
nt from e.g. single crystals with artificial columnar defects.