Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

The reflection shift Delta2 Theta caused by a radial shift hr of the sample away from its tangential position at the focusing circle is examined for g razing incidence diffraction and grazing excidence diffraction. Experimenta l results for residual strain/stress evaluation on thin films using a Bragg -Brentano diffractometer with a grazing incidence equipment are presented. Grazing excidence diffraction is less sensitive to Deltar than grazing inci dence diffraction. (C) 2000 International Centre e for Diffraction Data. [S 0885-7156(00)00404-8].