Wp. Kirk et al., Development of epitaxial silicon lattice-matched insulators: silicon heterostructures for quantum confinement, SUPERLATT M, 28(5-6), 2000, pp. 377-385
Epitaxial films of the wide-bandgap II-VI beryllium chalcogenide semiconduc
tors, BeTe, BeSe, and BeSeTe were grown on arsenic-terminated silicon subst
rates by MBE. Silicon was also epitaxially regrown on Be-chalcogenide films
. Initial structural characterization revealed the desired smooth two-dimen
sional nature of the layer growth. The composition of BeSeTe ternary films
was governed by the Be/Se flux ratio during deposition rather than by the S
e/Te flux ratio. The variation in Be/Se flux ratio or in the sticking coeff
icients due to temperature gradients led to radial compositional inhomogene
ity. Current versus temperature measurements of the Be-chalcogenide films a
t elevated temperatures analyzed assuming thermionic emission over the hete
rojunction barrier, showed conduction band offsets of 1.2 eV for the BeSe0.
41Te0.59/As/Si and 1.3 eV for the BeSe/As/Si heterostructures. At room temp
erature, current density through BeSe/Si and BeSe0.41Te0.59/Si films was mi
d-10(-9) A cm(-2) at 0.1 MV cm(-1), similar to previously reported values f
or ZnS/Si, while BeTe/Si films had orders of magnitude higher current densi
ty, possibly due to interfacial recombination. (C) 2000 Academic Press.