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Electron collision data for plasma-processing gases
Authors
Christophorou, LG
Olthoff, JK
Citation
Lg. Christophorou et Jk. Olthoff, Electron collision data for plasma-processing gases, ADV ATOM MO, 44, 2001, pp. 59-98
Citations number
79
Categorie Soggetti
Current Book Contents
Journal title
ADVANCES IN ATOMIC, MOLECULAR, AND OPTICAL PHYSICS, VOL 44
ISSN journal
1049250X →
ACNP
Volume
44
Year of publication
2001
Pages
59 - 98
Database
ISI
SICI code
1049-250X(2001)44:<59:ECDFPG>2.0.ZU;2-W