Authors
Citation
T. Makabe, Radio-frequency plasma modeling for low-temperature processing, ADV ATOM MO, 44, 2001, pp. 127-154
Citations number
27
Categorie Soggetti
Current Book Contents
Journal title
ADVANCES IN ATOMIC, MOLECULAR, AND OPTICAL PHYSICS, VOL 44
ISSN journal
1049250X
→ ACNP
Volume
44
Year of publication
2001
Pages
127 - 154
Database
ISI
SICI code
1049-250X(2001)44:<127:RPMFLP>2.0.ZU;2-W