FATIGUE AND REFRESHMENT OF (PB, LA)TIO3 THIN-FILMS BY MULTIPLE CATHODE SPUTTERING

The ferroelectric fatigue and refreshment of (Pb, La)TiO3 thin films b g multiple cathode rf-magnetron sputtering were investigated. The rema nent polarization of the fatigued (Pb, La)TiO3 thin films increased af ter the application of the DC bias voltage of -20 V for 10(4) s. By he at treatment of the fatigued films at 400 degrees C for 1 h, the coerc ive field decreased. and squareness of the loop was improved, These be haviors were discussed from the viewpoint of the behavior of defect di poles.