PREPARATION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS BY REACTIVE EVAPORATION

Lead zirconate titanate thin films have been successfully fabricated b y reactive evaporation. Elemental Pb, Zr, and Ti were evaporated in oz one-oxygen mixture ambient. Excellent controls of uniformity of thickn ess and composition were achieved over a large area (within +/-2% on 4 -inch wafer). The electrical properties were examined as a function of Pb content in the films. High dielectric constant (epsilon similar to 1000) and low leakage current (1.7x10(-7) A/cm(2)) were realized for the film with stoichiometric composition.