We report on the successful growth of beta -Ga2O3 single crystals using the
Czochralski method. Model calculations show that the gas phase consists of
Ga2O, GaO or Ga independent of the ratio of oxygen and Ar or N-2. We find
that for growing single crystals the evaporation has to be suppressed by a
finite amount of oxygen. A CO2/Ar gas atmosphere was found to meet this req
uirement. (C) 2000 Elsevier Science B.V. All rights reserved.