ALKALINE-EARTH COMPLEXES AS PRECURSORS FOR METALORGANIC CHEMICAL-VAPOR-DEPOSITION

Authors
TASAKI Y SAKAMOTO R OGAWA Y YOSHIZAWA S ISHIAI J AKASE S
Citation
Y. Tasaki et al., ALKALINE-EARTH COMPLEXES AS PRECURSORS FOR METALORGANIC CHEMICAL-VAPOR-DEPOSITION, JPN J A P 1, 33(9B), 1994, pp. 5400-5403
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
33
Issue
9B
Year of publication
1994
Pages
5400 - 5403
Database
ISI
SICI code
Abstract
The dipivaloylmethanato complexes of barium and strontium synthesized in anhydrous solvent were found to be more volatile and thermally stab ler than those synthesized in aqueous solution. The pentamethylcyclope ntadienyl complexes of barium and strontium vaporized at much lon er t emperatures than dipivaloylmethanato complexes, and they could be empl oyed as precursors for metalorganic chemical vapor deposition (MOCVD) by using nitrous oxide as the oxidant.