Fabrication of a thermopneumatic micropump with aluminum flap valves

This paper discusses the fabrication and the test of a thermopneumatic micr opump. The micropump consists of a heater, an air chamber, a corrugated p() silicon diaphragm, and a pair of cantilever-type aluminum Rap valves, all of which were fabricated LS' micromachining. Alternate ohmic heating and n atural cooling of the air chamber make the diaphragm vibrate. The fabricate d flap valves reveal proper flow characteristics as passive check valves. T he maximum flow rate of the fabricated micropump is about 156 mul/min at 4 Hz when the average input power is 0.2 W.