Mesh generation method for topographically complex surfaces

A mesh generation algorithm for complex geometry has been developed using a n NURBS (nonuniform rational B-spline) surface front the scattered data poi nts. We applied the algorithm for a cell-based simulation and a level set s imulation. The triangulation of a surface is initiated by describing the ge ometry along the polygonal boundary with multiple points. In this paper, an NURBS surface can be generated with scattered data for each polygonal surf ace by employing a multilevel B-spline surface approximation. The NURBS mes h according to our algorithm excellently represented the surface evolution of the topography on the wafer. A cylinder-type DRAM cell capacitor was cho sen to test the capability of our model. We obtained the mesh with 70078 no des, 395064 tetrahedra, and 0.81 mean quality factor, Moreover, we performe d the mesh generation for a torso with a complex curved surface. A high qua lity factor of 0.92 was obtained with 3289 nodes and 6571 triangles.