Microelectronics and nanometer structures - Processing, measurement, and phenomena - Preface

Authors
Melngailis, J
Citation
J. Melngailis, Microelectronics and nanometer structures - Processing, measurement, and phenomena - Preface, J VAC SCI B, 18(6), 2000, pp. 2876-2876
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
18
Issue
6
Year of publication
2000
Pages
2876 - 2876
Database
ISI
SICI code
1071-1023(200011/12)18:6<2876:MANS-P>2.0.ZU;2-9