Focused electron beam induced deposition of gold

Codeposition of hydrocarbons is a severe problem during focused electron be am writing of purr: metal nanostructures. When using organometallic precurs ors, a low metal content carbonaceous matrix embedding and separating numer ous nanosized metal clusters is formed. Tn this work, we present a new and easy approach to obtain high purity gold lines: the use of inorganic PF3AuC l as a precursor. Electrical resistivities as low as 22 mu Omega cm at 295 K (ten times the bulk Au value) were obtained. This is to our knowledge the best value for focused electron beam deposition obtained from the vapor ph ase so far. No special care was taken to prevent hydrocarbon contamination. The deposited nanostructure consists of gold grains varying in size and pe rcolation with beam parameters. (C) 2000 American Vacuum Society. [S0734-21 1X(00)06906-7].