Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ focused ion beam assisted deposition using a aromatic hydrocarbon prec ursor. The characterization of deposited film on a silicon substrate was pe t-formed by a transmission microscope and Raman spectra. This result indica tes that the deposition film is a diamondlike amorphous carbon. Production of three-dimensional nanostructure is discussed. Microcoil, drill, and bell ows with 0.1 mum dimension were fabricated as parts of the microsystem. Fur thermore, microstructure plastic arts is advocated as a new field using mic robeam technology, presenting one example of a microwine glass with 2.75 mu m external diameter and 12 mum height. (C) 2000 American Vacuum Society. [S 0734-211X(00)06806-2].