Scanning probe metrology in the presence of surface charge

Surface charge on insulating samples can be a significant source of error f or scanning probe microscopes. We have found that it is possible to operate a scanning force microscope in a manner that makes it relatively immune to charge-induced forces while still allowing the probe tip to nondestructive ly follow the surface topography. The need to maintain close charge balance on the sample is thus obviated. We have used this strategy to perform crit ical dimension measurements on optical photomasks with the Surface/Interfac e Stylus NanoProfilometer. This instrument incorporates a servoed force-bal ance sensor. Surface topography is determined by touching the surface with contact forces between 0.1 and 1 muN. (C) 2000 American Vacuum Society. [S0 734-211X(00)01706-6].