Master replication into thermosetting polymers for nanoimprinting

Citation
H. Schulz et al., Master replication into thermosetting polymers for nanoimprinting, J VAC SCI B, 18(6), 2000, pp. 3582-3585
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
18
Issue
6
Year of publication
2000
Pages
3582 - 3585
Database
ISI
SICI code
1071-1023(200011/12)18:6<3582:MRITPF>2.0.ZU;2-2
Abstract
Replication of the e-beam master into thermosetting polymers was investigat ed for low cost working stamp fabrication for nanoimprint lithography (Nn). Negative as well as positive replicas from a master were fabricated in a t hermal replication step from duroplastic material. Without any further trea tment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-90 30 as well as PMMA for comparison. All replications were done in a NIL proc ess. The replication quality is excellent when a suitable imprint procedure is used. (C) 2000 American Vacuum Society. [S0734-211X(Oo)07606-X].