Replication of the e-beam master into thermosetting polymers was investigat
ed for low cost working stamp fabrication for nanoimprint lithography (Nn).
Negative as well as positive replicas from a master were fabricated in a t
hermal replication step from duroplastic material. Without any further trea
tment these working stamps were able to imprint thermoplastic polymers. To
demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-90
30 as well as PMMA for comparison. All replications were done in a NIL proc
ess. The replication quality is excellent when a suitable imprint procedure
is used. (C) 2000 American Vacuum Society. [S0734-211X(Oo)07606-X].