Microhardness measurements of structures, obtained by a solid-state reactio
n of iron with silicon are undertaken. The experimental results support the
finding that the indentation size effect (ISE) appears in the microhardnes
s-depth profile whenever the indentor crosses an interface. When modelling
the experimental microhardness-depth profiles of the multilayered structure
s, an analytical expression for the coefficient giving the contributions of
the film and the substrate hardnesses to the composite one is offered. A v
alue of 9.60 GPa is obtained for the microhardness of beta -FeSi2 thin laye
r. On the base of the microhardness-depth profiles measurement conclusions
about the solid-state reaction process are drawn. (C) 2000 Elsevier Science
S.A. All rights reserved.