Ja. Rebane et al., CVD SYNTHESIS AND SNMS CHARACTERIZATION OF THIN-FILMS OF ABO(3) PEROVSKITE-TYPE MATERIALS (PBTIO3, LA(SR)COO3, LA(SR)MNO3, LANIO3), Thin solid films, 302(1-2), 1997, pp. 140-146
Powder flash evaporation and aerosol-MOCVD (organometallic chemical va
pour deposition) methods were applied for the deposition of thin films
and heterostructures of ABO(3) perovskite type-materials. It was show
n that the plasma-SNMS (secondary neutral mass spectrometry) can be su
ccessfully used for the quantitative analysis of these thin films. Hig
h density ceramics were found to be good reference samples for such an
analysis. It was shown that the interaction between PbTiO3 thin films
and La(Sr)CoO3 (electrode material) is negligible under deposition co
nditions. The interaction between La(Sr)CoO3 thin films and ZrO2(Y2O3)
substrate takes place only at the temperatures higher than 900 degree
s C. La(Sr)MnO3 thin films react with the Si substrate during depositi
on by aerosol-MOCVD with formation of a silicate layer. In the case of
La(Sr)CoO3 this reaction is retarded because of low oxygen partial pr
essure. This decrease of oxygen content in the gaseous phase near the
substrate is caused by the catalytic oxidation of solvent (diglyme) at
the surface of a La(Sr)CoO3 film. (C) 1997 Elsevier Science S.A.